Senturia, Stephen D., 1940-
Microsystem design / Stephen D. Senturia. - Boston : Kluwer Academic Publishers, 2001. - xvi, 689 pages. : ill. ; 24 cm.
NBL011121
eng
hbk
0792372468 (alk. paper)
Microelectromechanical systems--Design and construction.
System design.
Microelectronics.
621.381 S478M 2001 c.1
Microsystem design / Stephen D. Senturia. - Boston : Kluwer Academic Publishers, 2001. - xvi, 689 pages. : ill. ; 24 cm.
NBL011121
eng
hbk
0792372468 (alk. paper)
Microelectromechanical systems--Design and construction.
System design.
Microelectronics.
621.381 S478M 2001 c.1