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Introductory MEMS : fabrication and applications / Thomas M Adams

By: Adams, Thomas M.
Contributor(s): Layton, Richard A.
Material type: materialTypeLabelBookPublisher: New Delhi : Springer, 2012Description: xv, 444 p. ill.ISBN: 9788132206637.Subject(s): Digital electronics | ElectronicsDDC classification: 621.381 A211I 2012
Contents:
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures -- micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
Summary: This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style. Read less
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Item type Current location Call number Status Date due Barcode Item holds
Books Books Information Technology University, Lahore
General Stacks 		621.381 A211I 2012 (Browse shelf) Available 001043
Total holds: 0

includes index.

1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures -- micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.

This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style. Read less

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