Senturia, Stephen D., 1940-
Microsystem design /
Stephen D. Senturia.
- Boston : Kluwer Academic Publishers, 2001.
- xvi, 689 pages. : ill. ; 24 cm.
NBL011121
eng
hbk
0792372468 (alk. paper)
Microelectromechanical systems--Design and construction.
System design.
Microelectronics.
621.381 S478M 2001 c.1