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1.
Microsystem design / Stephen D. Senturia.

by Senturia, Stephen D, 1940-.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: Boston : Kluwer Academic Publishers, 2001Availability: Items available for loan: [Call number: 621.381 S478M 2001 c.1] (5).
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2.
Microsystem design / Stephen D. Senturia.

by Senturia, Stephen D, 1940-.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: New York : Springer Science, 2001Availability: Items available for loan: [Call number: 621.381 S478M 2001] (1).

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